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Comparative measurements of the negative ion density in SF6/Ar plasma.
- Authors
- 정규선
- Issue Date
- 6-Mar-2012
- Publisher
- ISPlasma2012 Organizing Committee
- Citation
- 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomat
- Conference Name
- 4th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomat
- Place
- Japan
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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