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Fabrication of Sub-30nm Pillar Array by Oxygen Plasma Treatment
- Authors
- 이승백
- Issue Date
- 5-Feb-2012
- Place
- 고려대학교, 서울
- Conference Name
- 제 19회 반도체 학술대회
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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Related Researcher
- Lee, Seung Beck
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)