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Resist Trimming Technique in Oxygen Plasma for Sub-30nm Pillar Array
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이승백 | - |
| dc.date.accessioned | 2021-08-03T15:50:29Z | - |
| dc.date.available | 2021-08-03T15:50:29Z | - |
| dc.date.issued | 2011-12-05 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/52920 | - |
| dc.title | Resist Trimming Technique in Oxygen Plasma for Sub-30nm Pillar Array | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2011 한국자기학회 | - |
| dc.citation.conferencePlace | Ramada hotel, Jeju | - |
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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- Lee, Seung Beck
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)