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Study of optical and structural changes in silica photomask glass by laser irradiation

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dc.contributor.author신동욱-
dc.date.accessioned2021-08-03T18:22:00Z-
dc.date.available2021-08-03T18:22:00Z-
dc.date.created2021-06-30-
dc.date.issued2010-11-23-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/56556-
dc.publisherThe Korean Institute of Metals and Materials-
dc.titleStudy of optical and structural changes in silica photomask glass by laser irradiation-
dc.typeConference-
dc.contributor.affiliatedAuthor신동욱-
dc.identifier.bibliographicCitationENGE 2010-
dc.relation.isPartOfENGE 2010-
dc.citation.titleENGE 2010-
dc.citation.conferencePlaceRamada Plaza Jeju Hotel, Jeju Island, Korea-
dc.type.rimsCONF-
dc.description.journalClass2-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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