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Adhesion properties of Ruthenium thin films deposited by remote plasma Atomic Layer Deposition
- Authors
- 전형탁
- Issue Date
- 11-Nov-2010
- Place
- 무주리조트
- Conference Name
- 2010년도 한국재료학회 추계학술발표대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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