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Investigation of the effect of plasma treatments in various ambients on the electrical properties of MIS structure by RPALD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T19:20:50Z | - |
| dc.date.available | 2021-08-03T19:20:50Z | - |
| dc.date.issued | 20100823 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/57944 | - |
| dc.title | Investigation of the effect of plasma treatments in various ambients on the electrical properties of MIS structure by RPALD | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | IUMRS-ICEM 2010 | - |
| dc.citation.conferencePlace | KINTEX , GyeongGi-Do, Korea | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)