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Paddle-type MEMS sensors for size dependent particle detection using electrostatic triggering
- Authors
- 이승백
- Issue Date
- 20-Aug-2010
- Place
- KINTEX KOREA
- Conference Name
- IEEE NANO 2010 10th IEEE International Conference on Nanotechnology Joint Symposium with NANO KOREA
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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Related Researcher
- Lee, Seung Beck
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)