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Potassium Permanganate as Oxidizer in Alkaline Slurry for Chemical Mechanical Polishing of Nitrogen-doped Polycrystalline Ge2Sb2Te5 Film
- Authors
- 박재근
- Issue Date
- 10-Jun-2010
- Place
- 성균관대학교(Korea)
- Conference Name
- 2010 45th Technical Meeting of Korea CMPUGM
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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