Chemical vapor transport synthesis and optical property of MoO3 thin film

Abstract

Transition metal oxides have attention in the industrial application fields of photochromic, electrochromic, sensor, catalyst and electrode for microbatteries. Among them, MoO3 thin films have been extensively investigated in the electrochromic (EC) device field due to its superior optical properties. Recently, many deposition techniques to deposit Mo oxide thin films have been developed. In this study, new deposition technique for the successful deposition of homogeneous MoO3 thin films was accomplished through the chemical vapor transport of volatile MoO3(OH)2 during the reduction of MoO3 powder and subsequent thermal annealing. As annealing commenced, the optical transmittance of the films increased due to enhancement of the crystallinity resulted from oxygen vacancy reduction and increase of the relative density from reduction of porosity. Also, electrochromic property of the annealed MoO3 thin film was analyzed by intercalation of ions in LiClO4 dissolved in propylene carbonate (PC) as electrolyte.