Chemical Vapor Transport Synthesis and Electrochromic Property of MoO3 Thin Film

Abstract

Mo03. one of the transition metal oxides has an attention in the industrial application fields of photochromic, electrochromic, sensor and catalyst. Among them, Mo03 thin films have been extensively investigated in the electrochromic (EC) device field due to its superior optical properties. Recently, many deposition techniques to deposit Mo oxide thin films have been developed including chemical vapor deposition (CVD), evaporation, sol-gel coating, RF magnetron sputtering, and pulsed laser deposition (PLD). In this study, homogeneous Mo02 thin films was successfully deposited by the chemical vapor transport (CVT) of MoO3(OH)2 during the reduction of Mo03 powder in H2 and Mo03 thin film was subsequently obtained by thermal annealing. The annealed Mo03 thin film was intercalated by ions in the electrolyte as LiCI04 dissolved in propylene carbonate (PC) and electrochromic property of the film was analyzed.