Patterning of Ag thin films with micro Transfer Molding

Abstract

We report a new metal particle transfer printing method using inkpad method. In this technique, an elastomeric stamp is prepared by casting against a master. A Ag particle pad is formed on the oxidized surface of the substrate by spin coating. The patterned PDMS contacts to the metal particle ink pad a few seconds. When the PDMS lifted up, the metal particle on the raised regions of the stamp is transferred to the oxide substrate and a metal pattern is formed. The Ag particle-coated prepatterned PDMS can make conformal contact with SiO2 substrate. The patterned Silver films have been investigated by atomic force microscopy (AFM), optical microscopy (OM) and scanning electron microscopy (SEM).