Mo thin film deposition for back contact electrode of solar cell

Abstract

In this study, deposition of the Mo02 thin film was successfully accomplished by the chemical vapor transport (CVT) of the volatile Mo03(OH)2 and subsequently, Metallic Mo thin film was obtained through the reduction of the deposited Mo02 film in H2 atmosphere. The low resistivity of the Mo thin film can be adapted to display electrode layer and back contact elεctrode of CIS based compound thin film solar cells.