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Real-time detection of airborne dust particles using highly sensitive paddle type silicon cantilevers

Authors
이승백
Issue Date
27-May-2009
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/61641
Place
Florida, USA
Conference Name
International conference on electron, ion and photon beam and microfabrication
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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