Surface modifications of organic-inorganic hybrid film on PDMS stamp for imprinting lithography using Molecular Layer Deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 성명모 | - |
dc.date.accessioned | 2021-08-03T21:53:03Z | - |
dc.date.available | 2021-08-03T21:53:03Z | - |
dc.date.created | 2021-06-30 | - |
dc.date.issued | 2009-04-16 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/62100 | - |
dc.description.abstract | Molecular Layer Deposition(MLD) has been utilized for the surface engineering. We chose the surface modification of Al2O3 and 1H, 1H, 2H, 2H - perfluorooctyltrichlorosilane(FTS) as an example to demonstrate the concept of MLD-based approach. The Samples were characterized by Contact Angle Analysis(CAA), Scanning Electron Microscopy(SEM), X-Ray Photoelectron Spectroscopy(XPS), Atomic Force Microscopy(AFM) and stamping test of surface modificated PDMS stamp using MLD. The results show that surface modificated PDMS stamp has better properties than PDMS stamp which not surface modificated. | - |
dc.publisher | 대한화학회 | - |
dc.title | Surface modifications of organic-inorganic hybrid film on PDMS stamp for imprinting lithography using Molecular Layer Deposition | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 성명모 | - |
dc.identifier.bibliographicCitation | 대한화학회 제103회 총회 및 학술발표회 | - |
dc.relation.isPartOf | 대한화학회 제103회 총회 및 학술발표회 | - |
dc.citation.title | 대한화학회 제103회 총회 및 학술발표회 | - |
dc.citation.conferencePlace | 서울 COEX | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 2 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
222, Wangsimni-ro, Seongdong-gu, Seoul, 04763, Korea+82-2-2220-1365
COPYRIGHT © 2021 HANYANG UNIVERSITY.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.