New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 성명모 | - |
dc.date.accessioned | 2021-08-03T22:38:38Z | - |
dc.date.available | 2021-08-03T22:38:38Z | - |
dc.date.created | 2021-06-30 | - |
dc.date.issued | 2008-11-04 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/63137 | - |
dc.publisher | Material Research Society & Asianano 2008 | - |
dc.title | New Fabrication Methods of Nanostructural Materials using Molecular Layer Deposition with Atomic Layer Deposition | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 성명모 | - |
dc.identifier.bibliographicCitation | The 2008 Asian Conference on Nanoscience and Nanotechnology | - |
dc.relation.isPartOf | The 2008 Asian Conference on Nanoscience and Nanotechnology | - |
dc.citation.title | The 2008 Asian Conference on Nanoscience and Nanotechnology | - |
dc.citation.conferencePlace | 싱가폴 Biopolis | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
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