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Atomic Layer Deposited Thin Films and Their Applications
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T00:20:40Z | - |
| dc.date.available | 2021-08-04T00:20:40Z | - |
| dc.date.issued | 2008-03-10 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/65385 | - |
| dc.title | Atomic Layer Deposited Thin Films and Their Applications | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | TMS 2008 137th Annual Meeting & Exhibition | - |
| dc.citation.conferencePlace | New Orleans, Louisiana, USA | - |
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