Template-Growth and Size Control of ZnO Nanowires by Using Atomic Layer Deposition

Abstract

We have been studied the fabrication of nanowires by using atomic layer deposition (ALD) with a nanoporous membrane as a template. The Al2O3 nanotubes were formed inside the polycarbonate (PC) template or anodic aluminum oxide (AAO) by using atomic layer deposition (ALD) from trimethylaluminum (TMA) and H2O at 405K. Due to the excellent coatings of the ALD process, the wall thickness of the oxide nanotubes and thus the inner diameter of the tubes could be controlled. ZnO deposited with Diethyl Zinc (DEZn) and water inside Al2O3 nanotubes. The ZnO nanowires were successfully fabricated with ultra-precise control of the Al2O3 wall thickness, so as to inner diameter of the ZnO nanowire. The ZnO nanowires have been investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).