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Effect of microwave irradiation on electrical and optical properties of ZnO thin films growth by atomic layer deposition

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dc.contributor.author전형탁-
dc.date.accessioned2021-07-30T08:25:30Z-
dc.date.available2021-07-30T08:25:30Z-
dc.date.issued20201119-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6776-
dc.titleEffect of microwave irradiation on electrical and optical properties of ZnO thin films growth by atomic layer deposition-
dc.typeConference-
dc.citation.conferenceName2020 한국재료학회 춘,추계통합학술대회-
dc.citation.conferencePlace휘닉스 제주 섭지코지-
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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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