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Effects of Abrasive Size and Molecular Weight of Poly(acrylic-acid) in Ceria Slurry on Pattern Density and Removal Selectivity of SiO2 SiN4 Films in STI
- Authors
- 백운규
- Issue Date
- 19-Apr-2007
- Place
- 휘닉스파크
- Conference Name
- 한국물리학회 2007년 봄 학술논물발표회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)