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차세대 플라즈마 원자층증착을 이용한 고품질 자기정렬다중패터닝 spacer 원천기술 개발
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-07-30T08:25:38Z | - |
| dc.date.available | 2021-07-30T08:25:38Z | - |
| dc.date.issued | 20201116 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/6812 | - |
| dc.title | 차세대 플라즈마 원자층증착을 이용한 고품질 자기정렬다중패터닝 spacer 원천기술 개발 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 미래반도체소자 2020년 하반기 총괄워크숍 | - |
| dc.citation.conferencePlace | 서울 코엑스 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)