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Effects of Abrasive Size and Concentration with An-ionic Surfactant on the Non-Prestonian Behavior of Ceria Slurry in STI-CMP
- Authors
- 백운규
- Issue Date
- 3-Nov-2006
- Place
- Moon Palace Hotel(Mexico)
- Conference Name
- ECS-2006 JOINT INTERNATIONAL MEETING
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)