Size Control of Cu-Nanowires in an AAO Template by Using Atomic Layer Deposition

Abstract

We have been studied the fabrication of nanowires using atomic layer deposition (ALD) and electrodeposition with a anodic aluminum oxide(AAO) as the template. The membranes used in this study were anodic aluminum oxide(AAO) with pore size of 60nm diameter. The Al2O3 nanotube were formed inside the AAO template by using ALD from trimethylaluminum (TMA) and H2O at 405K. Due to the excellent coatings of the ALD process, the wall thickness of the oxide nanotubes, and thus the inner diameter of the tubes, could be controlled. The Cu nanowires were deposited by using electrodeposition into Al2O3 nanotubes. The Cu-nanowires were successfully fabricated with ultra-precise control of the Al2O3 wall thickness, so as to inner diameter of the Cu wire. The Cu nanowires have been investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).