Three-Dimensional Nanofabracation with a Water-Mediated Transfer Process

Abstract

This paper presents methods Three-Dimensional Nanofabracation of Aluminum films onto a substrates. Figure 1 presents the procedures for patterning Al metal thin films with water-mediated nTP. First, a patterned PDMS stamp is fabricated and coated by octadecylsiloxane self-assembled monolayer (SAM), as a release layer. Second, an Al thin film is uniformly evaporated on the patterned stamp surface coated with SAM. This SAM layer ensures weak adhesion between the deposited Al and the stamp, and promotes to release easily and completely Al from the stamp. Third, this stamp is brought into contact with a substrate surface coated with water layer. After drying the water layer, the separation of the stamp from the substrate then results in the pattern transfer process. The surfaces were characterized by scanning electron microscopy (SEM)