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Characteristics of Hf-silicate Thin Film Grownby Remote Plasma Atomic Layer Deposition with Various Silicon Composition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T02:50:39Z | - |
| dc.date.available | 2021-08-04T02:50:39Z | - |
| dc.date.issued | 2006-07-25 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/69710 | - |
| dc.title | Characteristics of Hf-silicate Thin Film Grownby Remote Plasma Atomic Layer Deposition with Various Silicon Composition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | AVS International Conference on Atomic Layer Deposition | - |
| dc.citation.conferencePlace | 서울교육문화회관 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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