Self-Assembled Multilayers Fabricated by using 7-octenyltrichlorosilane on Metal Oxide Surface

Abstract

Self-assembled multilayers of 7-octenyltrichlorosilane (CH2=CH2(CH2)6SiCl3, V-OTS) have been prepared on SiO2, TiO2, Al2O3 and others metal oxides substrates. The film thickness was controlled by repeated cycles of self-assembled monolayers(SAMs) in a nonaqueous solvent containing V-OTS and O3-treatment in atmosphere. We have used the new activation method that reactions between ozone and C=C functional group proceed through the formation of carboxylic acid moiety and than they were subsequently converts to an interchain carboxylic acid anhydride. Self-assembled multilayers were investigated by using X-ray photoelectron spectroscopy (XPS) and contact angle analysis, atomic force microscopy (AFM) and transmission electron microscopy (TEM).