A New Fabrication Method of Orgaic-Inorganic Nanolaminate Thin Films by Using Molecular Layer Deposition

Abstract

We have developed a new growth technique of organic-inorganic nanolaminate thin films with ultra-precise thickness control. This method is based on the molecular layer deposition of self-assembled monolayers (SAMs) in vacuum. Nanocomposites are a new frontier in materials science because composites can have very different properties than their constituents. The SAMs/TiO2 nanolaminate thin films show a good chemical stability and unique physical properties when the nanolayer thickness is less than the characteristic length scale that defines the physical property. The nanolaminate thin films have been investigated by transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), water contact angles analysis, and digital multimeter.