Fabrication of Li2O-B2O3-P2O5 Solid Electrolyte by Aersol Flame Deposition for Thin Film Battery

Abstract

Among various types of solid electrolytes, lithium ion conducting amorphous oxide glasses are one of the promising candidates for lithium micro battery applications. In spite of its advantages such as strong resistance to moisture, wide range composition of choice and isotropic conduction and the freedom from the safety issues caused by the reaction between electrolyte and electrode the low ion conductivity of oxide glass electrolytes has been a main limiting factor for real applications. However, this shortcoming is less serious in the application for thin film battery where the thickness of electrolyte is thin enough to reduce the resistance of electrolyte to desired level. In this research, we report the method to fabricate amorphous Li2O-B2O3-P2O5 thin films from aqueous precursor solution of a CH3CO2Li ·2H2O and C9H21BO3, H3PO4 by the Aersol Flame Deposition and subsequent heat treatment and the crystallographic electrical properties of produced nano-particles and thin film. It was demonstrated that Aerosol Flame Deposition is a promising method to prepare the thin film oxide glass electrolytes since it enables the high speed deposition in ambient atmosphere.