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Effect of nitrided silicate as a buffer layer for HfO2 thin films grown by remote plasma atomic layer deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T03:22:04Z | - |
| dc.date.available | 2021-08-04T03:22:04Z | - |
| dc.date.issued | 2006-05-08 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/70327 | - |
| dc.title | Effect of nitrided silicate as a buffer layer for HfO2 thin films grown by remote plasma atomic layer deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 209th ESC meeting | - |
| dc.citation.conferencePlace | dam`s Mark Denver Hotel, Denver | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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