Fabrication of Oganic Multi-layers Using Molecular Layer Deposition

Abstract

Organic multilayers were quickly fabricated by molecular layer deposition with precise thickness control. This method is based on molecular layer deposition of self-assembled monolayers (SAMs) in vacuum. The 7-octenyltrichlorosilane as the SAMs precursor was formed by molecular layer deposition at 473K under vacuum. Then, the C=C terminal groups of the 7-octenyltrichlorosilane were activated by using O3 treatment under vacuum. It was found that the C=C terminal groups of the SAMs were converted to hydrophilic groups (e.g., OH, aldehydes, carboxylic acid) during the O3 treatment. The TiO2 thin layers for strong interaction between the SAMs molecules were grown by atomic layer deposition from titanium isopropoxide and water at 473K. These results demonstrate that the organic multilayers can be formed by repeated SAMs deposition under vacuum.