A Novel Fabrication Method of Organic Multilayer Film by Using 7-Octenyltrichlorosilane

Abstract

Organic multilayers of 7-octenyltrichlorosilane (CH2=CH2(CH2)6SiCl3, V-OTS) have been prepared on SiO2, TiO2 and Al2O3 substrates. Film thickness was controlled by repeated cycles of self-assembled monolayers(SAMs) in a nonaqueous solvent containing V-OTS and gas-phase ozone(O3) treatment in atmosphere. We have used the new activation method that reactions between ozone and C=C functional group proceed through the formation of carboxylic acid moiety and than they were subsequently converts to an interchain carboxylic acid anhydride. Organic multilayers were investigated by using X-ray photoelectron spectroscopy(XPS) and water contact angle analysis, atomic force microscopy(AFM) and transmission electron microscopy(TEM).