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Comparison Study of Crystallization and Thermal Stability of HfO2 Thin Film Deposited by Direct and Remote Plasma-Enhanced Atomic Layer Deposition
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T03:24:28Z | - |
| dc.date.available | 2021-08-04T03:24:28Z | - |
| dc.date.issued | 2006-04-20 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/70506 | - |
| dc.title | Comparison Study of Crystallization and Thermal Stability of HfO2 Thin Film Deposited by Direct and Remote Plasma-Enhanced Atomic Layer Deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2006 MRS spring meeting | - |
| dc.citation.conferencePlace | San Francisco | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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