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Analysis of chemical bond states and electrical properties from stack AlON/HfO2 gate oxides formed by a layer-by-layer technique

Authors
남창우
Issue Date
5-Dec-2005
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/70902
Place
라마다 플라자 제주 호텔
Conference Name
ICAMD 2005
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서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers

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COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF PHYSICS)
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