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Effect of the Incorporation of Nitrogen in HfO2 and HfO2 Ny Films Deposited by Remote Plasma Enhanced Atomic Layer Deposition Method
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-04T04:56:02Z | - |
| dc.date.available | 2021-08-04T04:56:02Z | - |
| dc.date.issued | 2005-03-29 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/73012 | - |
| dc.title | Effect of the Incorporation of Nitrogen in HfO2 and HfO2 Ny Films Deposited by Remote Plasma Enhanced Atomic Layer Deposition Method | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2005 MRS Spring Meeting | - |
| dc.citation.conferencePlace | San Francisco | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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