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Effect of abrasive size and concentration on the non-prestonian behavior of ceria slurry with surfactant for STI CMP
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-04T05:35:22Z | - |
| dc.date.available | 2021-08-04T05:35:22Z | - |
| dc.date.issued | 2004-10-22 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/73741 | - |
| dc.title | Effect of abrasive size and concentration on the non-prestonian behavior of ceria slurry with surfactant for STI CMP | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 가을 한국물리학회 | - |
| dc.citation.conferencePlace | 제주대학교 | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)