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The Effect of the Co-Solvent Addition on the Physicochemical Characteristics of Nano Colloidal Silica for Wafer Polishing Process
- Authors
- 박재근
- Issue Date
- 15-Oct-2004
- Place
- Gunsan University, Gunsan, Korea
- Conference Name
- 2004 Fall meeting of Korean Ceramic Society
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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