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나노 세리아 슬러리를 이용한 STI CMP에서 나노토포그라피 시뮬레이션
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-04T05:51:24Z | - |
| dc.date.available | 2021-08-04T05:51:24Z | - |
| dc.date.issued | 2004-07-09 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/74289 | - |
| dc.title | 나노 세리아 슬러리를 이용한 STI CMP에서 나노토포그라피 시뮬레이션 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국전기전자재료학회 2004년도 하계학술대회 | - |
| dc.citation.conferencePlace | 용평리조트 | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)