Carbon nanotube based nanoscale mechanical device structure fabrication

Abstract

The unique characteristics of carbon nanotubes have made them possible candidates for many different device applications, such as nanoscale field-effect transistors, chemical sensors, and electron emission sources. Another possible application is in nano-electromechanical systems (NEMS). The chemical inertness and mechanical reliability of carbon nanotubes at the nanoscale enables them to form integrated nanostructures that were not possible with conventional materials. To realize integrated on-chip NEMS applications using carbon nanotubes, a reliable method of placing individual adjacent control electrodes with nanoscale precision on suspended carbon nanotubes should be found. Here, I would like to present a study on fabrication and implementation of self-aligned nanoelectrodes on suspended carbon nanotubes for NEMS application..