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RF-Magnetron Sputtering법에 의한 NO sputter gas를 이용한 N이 도핑된 ZnO 박막 성장
- Authors
- 김태환
- Issue Date
- 23-Apr-2004
- Publisher
- 한국물리학회
- Citation
- 2004년 봄학술논문발표회
- Conference Name
- 2004년 봄학술논문발표회
- Place
- Sungkyunkwan University, Suwon, Korea
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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