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A Study on the Electrokinetic Behavior of Nano-size Ceria Particulate for Damascene Gate Chemical Mechanical Planarization in ULSI Process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 박재근 | - |
| dc.date.accessioned | 2021-08-04T06:21:19Z | - |
| dc.date.available | 2021-08-04T06:21:19Z | - |
| dc.date.issued | 2004-04-17 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75100 | - |
| dc.title | A Study on the Electrokinetic Behavior of Nano-size Ceria Particulate for Damascene Gate Chemical Mechanical Planarization in ULSI Process | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2004 spring meeting of Korean Ceramic Society | - |
| dc.citation.conferencePlace | Korea University, Seoul, Korea | - |
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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