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유도결합 플라즈마(ICP)를 이용한 Er 첨가된 광도파막 식각 특성 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 신동욱 | - |
| dc.date.accessioned | 2021-08-04T06:21:27Z | - |
| dc.date.available | 2021-08-04T06:21:27Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2004-04-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75109 | - |
| dc.publisher | 한국 세라믹 학회 | - |
| dc.title | 유도결합 플라즈마(ICP)를 이용한 Er 첨가된 광도파막 식각 특성 연구 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 신동욱 | - |
| dc.identifier.bibliographicCitation | 한국 세라믹 학회 | - |
| dc.relation.isPartOf | 한국 세라믹 학회 | - |
| dc.citation.title | 한국 세라믹 학회 | - |
| dc.citation.conferencePlace | 고려대학교 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- SHIN, DONG WOOK
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)