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Synthesis and characterization of novel molecular precursors of the oxides of zirconium and hafnium for the ALD
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 구상만 | - |
| dc.date.accessioned | 2021-08-04T06:23:12Z | - |
| dc.date.available | 2021-08-04T06:23:12Z | - |
| dc.date.issued | 2004-03-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75231 | - |
| dc.title | Synthesis and characterization of novel molecular precursors of the oxides of zirconium and hafnium for the ALD | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 227th ACS National Meeting | - |
| dc.citation.conferencePlace | Anaheim, CA, United States | - |
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Collections - 서울 공과대학 > 서울 화학공학과 > 2. Conference Papers
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