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First-Principles calculation: Initial adsorption process of Si/Mo (110) interface for EUV reflector
- Authors
- 정용재
- Issue Date
- 10-Nov-2003
- Place
- Aichi, Japan
- Conference Name
- The 2nd Asian international symposium on the science of engineering ceramics
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Chung, Yong Chae
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)