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FABRICATION OF PERFECT APERTURE FOR MICRO SOURCE LENSES IN ELECTRON BEAM SYSTEMS USING FOCUSED ION BEAM

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dc.contributor.author박재근-
dc.date.accessioned2021-08-04T06:40:03Z-
dc.date.available2021-08-04T06:40:03Z-
dc.date.issued2003-10-24-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/75860-
dc.titleFABRICATION OF PERFECT APERTURE FOR MICRO SOURCE LENSES IN ELECTRON BEAM SYSTEMS USING FOCUSED ION BEAM-
dc.typeConference-
dc.citation.conferenceName한국 물리학회 2003년도 가을 학술논문발표회-
dc.citation.conferencePlace경북대학교-
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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