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Atomistic investigation of the Si/Mo (110) interface for EUV reflectors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정용재 | - |
| dc.date.accessioned | 2021-08-04T06:52:27Z | - |
| dc.date.available | 2021-08-04T06:52:27Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2003-09-30 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/76158 | - |
| dc.publisher | International Sematech | - |
| dc.title | Atomistic investigation of the Si/Mo (110) interface for EUV reflectors | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 정용재 | - |
| dc.identifier.bibliographicCitation | 2nd International Extreme UltraViolet Symposium | - |
| dc.relation.isPartOf | 2nd International Extreme UltraViolet Symposium | - |
| dc.citation.title | 2nd International Extreme UltraViolet Symposium | - |
| dc.citation.conferencePlace | Antwerp, Belgium | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Chung, Yong Chae
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)