A new method of electron temperature determination in unmagnetized and magnetized RF plasmas without RF compensating circuit
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정규선 | - |
dc.date.accessioned | 2021-08-04T06:54:50Z | - |
dc.date.available | 2021-08-04T06:54:50Z | - |
dc.date.created | 2021-06-30 | - |
dc.date.issued | 2003-07-22 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/76317 | - |
dc.description.abstract | Collected current versus applied voltage(I-V) curve of Langmuir probe in RF plasma is severely distorted by RF fluctuations to cause overestimation of electron temperature. RF compensation circuit has been used to obtain the un-distorted I-V curve, yet it produces time-averaged one. A new and simple method is proposed to get time-resolved I-V curve by picking the synchronized RF signals with digital oscilloscope and Labview program This technique is tested in magnetized Helicon plasmas and unmagnetized capacitive coupled RF plasmas. | - |
dc.publisher | Max-Plank Institue of Plasma Physics | - |
dc.title | A new method of electron temperature determination in unmagnetized and magnetized RF plasmas without RF compensating circuit | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | 정규선 | - |
dc.identifier.bibliographicCitation | 5th International Workshop on Electrical Probes in Magnetized Plasmas | - |
dc.relation.isPartOf | 5th International Workshop on Electrical Probes in Magnetized Plasmas | - |
dc.citation.title | 5th International Workshop on Electrical Probes in Magnetized Plasmas | - |
dc.citation.conferencePlace | Greifwald, Germany | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
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