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초고집적 반도체 제조공정에서 CMP를 위한 나노 세라믹 입자 시스템
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-04T07:23:36Z | - |
| dc.date.available | 2021-08-04T07:23:36Z | - |
| dc.date.issued | 2003-04-18 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/76768 | - |
| dc.title | 초고집적 반도체 제조공정에서 CMP를 위한 나노 세라믹 입자 시스템 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2003년 춘계 한국세라믹학회 | - |
| dc.citation.conferencePlace | 경기대학교 | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)