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Surfactant and abrasive morphology effect on STI-CMP Slurry
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 백운규 | - |
| dc.date.accessioned | 2021-08-04T07:33:23Z | - |
| dc.date.available | 2021-08-04T07:33:23Z | - |
| dc.date.issued | 2003-02-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/76897 | - |
| dc.title | Surfactant and abrasive morphology effect on STI-CMP Slurry | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제10회 한국 반도체 학술대회 | - |
| dc.citation.conferencePlace | 그랜드힐튼서울호텔 | - |
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)