Electrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2021-08-04T07:35:12Z | - |
dc.date.available | 2021-08-04T07:35:12Z | - |
dc.date.issued | 20021202 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77025 | - |
dc.title | Electrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors | - |
dc.type | Conference | - |
dc.citation.conferenceName | 2002 MRS Fall meeting | - |
dc.citation.conferencePlace | Hynes Convention Center & Sheraton Boston Hotel and Towers , Boston Massachusetts | - |
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