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Electrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors

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dc.contributor.author전형탁-
dc.date.accessioned2021-08-04T07:35:12Z-
dc.date.available2021-08-04T07:35:12Z-
dc.date.issued2002-12-02-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77025-
dc.titleElectrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors-
dc.typeConference-
dc.citation.conferenceName2002 MRS Fall meeting-
dc.citation.conferencePlaceHynes Convention Center & Sheraton Boston Hotel and Towers , Boston Massachusetts-
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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