Study on Gettering Effect in Silicon Wafers Annealed with RTA
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 전형탁 | - |
dc.date.accessioned | 2021-08-04T07:48:36Z | - |
dc.date.available | 2021-08-04T07:48:36Z | - |
dc.date.issued | 20021026 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/77400 | - |
dc.title | Study on Gettering Effect in Silicon Wafers Annealed with RTA | - |
dc.type | Conference | - |
dc.citation.conferenceName | 한국물리학회 창립50주년 기념식/심포지엄/학술발표회 | - |
dc.citation.conferencePlace | 서울 한양대학교 | - |
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