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The effect of physicochemical characteristics of ceria particles on PETOS removal rate of chemical planarization for Shallow Trench Isolation
- Authors
- 백운규
- Issue Date
- 30-Aug-2002
- Place
- 한양대학교
- Conference Name
- The 2nd Asian conference on crystal growth and crystal technology
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)